ISSN:
1572-9605
Keywords:
MOCVD
;
YBCO thin films
;
mixed precursor
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract Single-phase YBa2Cu3O7−δ thin films withT c values around 90 K are readily obtained by using a single-source chemical vapor deposition technique with normal precursor mass transport. The quality of the films is controlled by adjusting the carrier gas flow rate and the precursor feed rate.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00730402
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