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  • 1
    ISSN: 1573-4870
    Keywords: Thin films ; magnetron sputtering ; structure ; SHS targets
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract The microstructures and compositions of multicomponent Ti–B–N, Ti–Si–B–N, Ti–Si–C–N, and Ti–Al–C–N films deposited by reactive magnetron sputtering using composite targets and produced by self-propagating high-temperature synthesis (SHS) have been investigated by means of transmission electron microscopy. Auger spectroscopy, and X-ray diffraction. Depending on the chemical composition of the film deposited, different single-phase crystalline films were observed. The sputtering process included sputter cleaning prior to the DC magnetron sputter deposition of Ti and TiN interlayers prior to DC magnetron sputter deposition of the multicomponent films from multicomponent targets. The films produced were characterized in terms of their microhardness, wear resistance, high-temperature oxidation conducted in air. and corrosion resistance in a solution of 5NH2SO4 at room temperature.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Springer
    Journal of materials synthesis and processing 7 (1999), S. 187-193 
    ISSN: 1573-4870
    Keywords: Ti–Si–B–N coatings ; magnetron sputtering ; SHS targets ; microhardness ; wear
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract Multicomponent Ti–Si–B–N coatings were deposited on high-speed steel (HSS) substrates by reactive magnetron sputtering using a SHS TiB + 20 wt% Si target. The influences of the substrate temperature, bias voltage, and nitrogen partial pressure on the structure and the elemental compositions of the films were studied. The films were characterized by high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and X-ray diffraction (XRD). The results of HRTEM analysis indicated the formation of an ordered–disordered structure with fine crystalline grains of hexagonal Ti(B,N) x phase and amorphous integrain layers. The stoichiometry of the Ti(B,N) x phase was strongly affected by PVD process parameters. The films were characterized in terms of their microhardness and wear resistance. The reasons for the high value of microhardness appear to be the result of stoichiometric phase composition, compressive residual stress, and dense and fine microstructure of the Ti–Si–B–N coatings. The tribological wear test results indicated the superior wear-resistant properties of Ti–Si–B–N coatings compared to TiN and Ti(C,N) coatings.
    Type of Medium: Electronic Resource
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