ISSN:
1572-8978
Keywords:
Process stability
;
process homogeneity
;
rt discharge
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract We performed a series of measurements by means of the triple probe technique during plasma deposition of polymer films on large volume plastic containers. Based on the measured data, the process stability and process homogeneity were determined. The process stability was better than 5% and process reproducibility was about 6%. An inhomogeneity of the plasma density correlated to the barrier efficiency of the film deposited at different positions on the container. An increase in the power losses were found after changes in the electrical configuration of the deposition set-up. The quotient of electron density ne and product of molar mass of the working gas M and its flow F is proposed as invariant instead the Yasuda's parameter W/MF for characterization of large-scale industrial plasma polymerization process.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1011362303242
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