ISSN:
0392-6737
Keywords:
Superconducting films
;
PACS 81.15.Cd
;
Deposition by sputtering
;
Microwave circuits (e.g., parametric, solid state)
;
Conference proceedings
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Summary Superconducting films of YBa2Cu3O7−x were depositedin situ on LaAlO3 substrates using single-target 90° off-axis sputtering. The obtained films have tipicalT c values of 91K. Surface resistance measurements on as-grown films reach 1.1 mΩ at 77K and 10GHz; whilst on ion-etched patterned resonant linesR s (77K, 10GHz) it is about 10mΩ.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02471859
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