ISSN:
1432-0630
Keywords:
PACS: 73.40.Qv; 73.40.c; 85.40.Qx; 85.30.Tv
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. The impact of device scaling on modern MOS technology is discussed in terms of the random telegraph signals (RTSs) and low-frequency noise in n-MOSFETs with gradually decreased channel widths. RTSs with very large amplitude (〉60%) are observed in the devices with ultra-narrow channels at room temperature for the first time. Furthermore, low-frequency noise spectra having both 1/f′ and Lorentzian type are found separately in the same ultra-narrow channel at different gate bias voltage, whereas only 1/f′ noise is observed in relatively wide channels. The observations strongly suggest that low-frequency noise in weak inversion dominantly suffer from carrier mobility fluctuation rather than carrier number fluctuation in ultra-narrow channels, which is confirmed by numerical simulations.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390050041
Permalink
