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Studies on the Al2O3-Ti-Mo-Au metallization system (1975)

Campisano, S. U. ; Nicolet, M.-A. ; Lugujjo, E. ; [et al.]

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Publication Date: 2011-08-16

Description: The behavior of Ti-Mo-Au metallization on Al2O3 and C has been investigated by backscattering spectrometry. Results show that Mo-Au bimetal films typically mix during deposition. Diffusion of Ti in Mo film occurs at 600 C, but is inhibited by the presence of oxygen in the Ti film. Even 1000 A of Mo is not a barrier against interdiffusion of Ti and Au during 20-min anneals at 600 C. The amount of mixing observed also depends on the nature of the substrate which supports the Ti-Mo-Au metallization.

Keywords: METALLIC MATERIALS

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