Electronic Resource
New York, NY
:
Wiley-Blackwell
Journal of Electron Microscopy Technique
2 (1985), S. 147-155
ISSN:
0741-0581
Keywords:
Electron-beam lithography
;
TEM/STEM
;
Polymethylmethacrylate
;
Life and Medical Sciences
;
Cell & Developmental Biology
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Natural Sciences in General
Notes:
A conventional TEM/STEM has been used for the fabrication of ∼ 10 nm-size structures by electron-beam lithography. The electron microscope provides a versatile tool for studying the lithographic process with control of the beam energy, current, and profile combined with the ability to image both the probe and fabricated structures. Straightforward techniques are described for generating ultrasmall structures for physics and device experiments on both bulk substrates and on thin films. New resist processes and the effects of electron-beam energy as studied by these techniques are discussed.
Additional Material:
10 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/jemt.1060020206
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