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  • 1
    Publication Date: 2019-07-13
    Description: Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest.
    Keywords: Instrumentation and Photography
    Type: NASA/TM-1999-209450 , NAS 1.15:209450 , E-11943 , Sensors Exposition; Sep 14, 1999 - Sep 16, 1999; Cleveland, OH; United States
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  • 2
    Publication Date: 2019-07-13
    Description: The detection of explosive conditions in aerospace propulsion applications is important for safety and economic reasons. Microfabricated hydrogen, oxygen, and hydrocarbon sensors as well as the accompanying hardware and software are being developed for a range of aerospace safety applications. The development of these sensors is being done using MEMS (Micro ElectroMechanical Systems) based technology and SiC-based semiconductor technology. The hardware and software allows control and interrogation of each sensor head and reduces accompanying cabling through multiplexing. These systems are being applied on the X-33 and on an upcoming STS-95 Shuttle mission. A number of commercial applications are also being pursued. It is concluded that this MEMS-based technology has significant potential to reduce costs and increase safety in a variety of aerospace applications.
    Keywords: Instrumentation and Photography
    Type: NASA/TM-1998-208817 , E-11419 , NAS 1.15:208817 , AIAA Paper 98-3614 , Joint Propulsion; Jul 12, 1998 - Jul 15, 1998; Cleveland, OH; United States
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  • 3
    Publication Date: 2019-07-13
    Description: Electronic grade Silicon Carbide (SiC) is a ceramic material which can operate as a semiconductor at temperatures above 600 C. Recently, SiC semiconductors have been used in Schottky diode gas sensor structures. These sensors have been shown to be functional at temperatures significantly above the normal operating range of Si-based devices. SiC sensor operation at these higher temperatures allows detection of gases such as hydrocarbons which are not detectable at lower temperatures. This paper discusses the development of SiC-based Schottky diode gas sensors for the detection of hydrogen, hydrocarbons, and nitrogen oxides (NO(x)). Sensor designs for these applications are discussed. High sensitivity is observed for the hydrogen and hydrocarbon sensors using Pd on SiC Schottky diodes while the NO(x) sensors are still under development. A prototype sensor package has been fabricated which allows high temperature operation in a room temperature ambient by minimizing heat loss to that ambient. It is concluded that SiC-based gas sensors have considerable potential in a variety of gas sensing applications.
    Keywords: Instrumentation and Photography
    Type: NASA-TM-113125 , NAS 1.15:113125 , E-10891 , Oct 06, 1996 - Oct 11, 1996; San Antonio, TX; United States
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  • 4
    Publication Date: 2019-07-13
    Description: The detection of explosive conditions in aerospace propulsion applications is important for safety and economic reasons. Microfabricated hydrogen, oxygen, and hydrocarbon sensors as well as the accompanying hardware and software are being, developed for a range of aerospace safety applications. The development of these sensors is being done using MEMS (Micro ElectroMechanical Systems) based technology and SiC-based semiconductor technology. The hardware and software allows control and interrocation of each sensor head and reduces accompanying cabling through multiplexing. These systems are being, applied on the X-33 and on an upcoming STS-95 Shuttle mission. A number of commercial applications are also being pursued. It is concluded that this MEMS-based technology has significant potential to reduce costs and increase safety in a variety of aerospace applications.
    Keywords: Instrumentation and Photography
    Type: NASA/TM-1998-208817 , E-11419 , NAS 1.15:208817 , AIAA Paper 98-3614 , Propulsion; Jul 12, 1998 - Jul 15, 1998; Cleveland, OH; United States
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  • 5
    Publication Date: 2019-07-13
    Description: Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest.
    Keywords: Instrumentation and Photography
    Type: Sensors; May 19, 1998 - May 21, 1998; San Jose, CA; United States
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  • 6
    Publication Date: 2019-07-13
    Description: Silicon carbide based Schottky diode gas sensors are being developed for applications such as emission measurements and leak detection. The effects of the geometry of the tin oxide film in a Pd/SnO2/SiC structure will be discussed as well as improvements in packaging SiC-based sensors. It is concluded that there is considerable versatility in the formation of SiC-based Schottky diode gas sensing structures which will potentially allow the fabrication of a SiC-based gas sensor array for a variety of gases and temperatures.
    Keywords: Instrumentation and Photography
    Type: NASA/TM-2000-209653 , E-12009 , NAS 1.15:209653 , Silicon Carbide and Related Materials; Oct 10, 1999 - Oct 15, 1999; Raleigh, NC; United States
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  • 7
    Publication Date: 2019-07-13
    Description: Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
    Keywords: Instrumentation and Photography
    Type: NASA/TM-1998-208816 , E-11418 , NAS 1.15: 208816 , Digital Avionics Systems; Oct 31, 1998 - Nov 06, 1998; Bellevue, WA; United States
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