ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    Contributions of different generations of recoils to sputtering by backscattered light ions (1994)
    Springer
    Il nuovo cimento della Società Italiana di Fisica 16 (1994), S. 75-88 
    Details
    ISSN: 0392-6737
    Keywords: Impact phenomena (including electron spectra and sputtering)
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Summary Neumann's expansion of the integral form of the Boltzmann transport equation is used to estimate the contribution of different generations of recoils to sputtering. By considering the flux generated by backscattered ions it is shown that primary recoils are, in the region of low energy (few keV), the main contribution to sputtering.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF02452004
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Energy distribution of reflected ions at normal incidence on the target surface (1996)
    Springer
    Il nuovo cimento della Società Italiana di Fisica 18 (1996), S. 873-881 
    Details
    ISSN: 0392-6737
    Keywords: Impact phenomena (including electron spectra and sputtering)
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Summary The energy distribution of reflected ions at normal incidence of the primary beam on the target surface is obtained as a result of approximate solution of the Boltzmann equation by the method of discrete streams. This method gives the opportunity to avoid the problem of negative distribution function, arising in the generally applied method of spherical harmonics, and to present the final result in analytical form. The analysis is performed for a power scattering cross-section and the theoretical energy distribution demonstrates one maximum when the ion mass is equal to the mass of a target atom, and two maxima when the ion mass is much less than the mass of a target atom.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF02457320
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 3
    Electronic Resource
    Electronic Resource
    The integral approach to the sputtering (1993)
    Springer
    Il nuovo cimento della Società Italiana di Fisica 15 (1993), S. 1159-1174 
    Details
    ISSN: 0392-6737
    Keywords: Impact phenomena (including electron spectra and sputtering)
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Summary The emission-oriented integral form of Boltzmann transport equation is applied to the sputtering phenomenon. It is shown that the central quantity in the formulation, namely the characteristic mean free path of the phenomenon, can be the low-energy transport mean free path. The same mean free path gives a measure of the mean escape depth as derived in experiments and computer simulation studies. Finally, the sputtering yields, calculated by using the same mean free path, when compared with the experimental results, show an evident improvement with respect to the Sigmund theory.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF02451724
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...