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  • 1
    Electronic Resource
    Electronic Resource
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 26 (1986), S. 1153-1157 
    ISSN: 0032-3888
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Soft X-ray radiation is affected neither by scattering in the resist nor by reflection from the substrate surface, so that a one-layer resist system can be maintained even in the sub-micron range. This holds primarily for the parallel synchrotron radiation avoiding all the geometrical distortions connected with X-ray tubes and even plasma sources. It has been shown that a minimum feature size of 0.2 μm can be achieved in this case. Different resist systems applicable in X-ray lithography have been tested regarding resolution, sensitivity, and etch stability. The optical resists Kodak ‘HPR 204’ shows very high process stability, good resolution, but low sensitivity. It is, therefore, suitable for an X-ray pilot process but not for high throughput production. The high sensitive X-ray resist TBM 120′ a fluorized poly(methyl methacrylate) which shows originally a very poor etch stability can be stabilized by post exposure with synchrotron radiation.
    Additional Material: 11 Ill.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 538 (1986), S. 53-60 
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Synthesis and X-Ray Structure Analysis of Bis(2,2,6,6-tetramethylpiperidine-1-oxidato-O,N)molybdenum (VI) DioxideThe title compound (1) was synthesized by a photoreaction of the 2,2,6,6-tetramethylpiperidin-1-oxyl [TMPO] radical with Mo(CO)6 and characterized by an X-ray structure analysis as (TMPO)2MoO2 complex. In the coordinatively unsaturated 16 electron compound of mm2 symmetry the MoVI is coordinated nearly tetrahedrally by the four ligands, the TMPO- ligands being O,N coordinated. The Mo—O, Mo—N, and Mo=O distances are 1.972(3), 2.198(3), and 1.711(2) Å respectively; the N—O distances are 1.436(4) Å. The stereochemistry of the Mo coordination is the same as in other (R2NO)2MoO2 complexes.
    Notes: Die Titelverbindung (1) wurde über eine Photoreaktion des 2,2,6,6-Tetramethylpiperidin-1-oxyl[TMPO]-Radikals mit Mo(CO)6 synthetisiert und röntgenstrukturanalytisch als (TMPO)2MoO2 Komplex charakterisiert. In der koordinativ ungesättigten 16-Elektronenverbindung der Symmetrie mm2 ist das MoVI nahezu tetraedrisch von den vier Liganden koordiniert. wobei die TMPO--Liganden O,N-koordiniert sind. Die Mo—O, Mo—N- und Mo=O-Abstände betragen 1,972(3), 2,198(3) bzw. 1,711(2) Å; die N—O-Abstände sind 1,436(4) Å lang. Die Stereochemie der Mo-Koordination ist dieselbe wie in anderen (R2NO)2MoO2 Komplexen.
    Additional Material: 3 Ill.
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  • 3
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Organoarsino-Substituted Sulphur Diimides: Crystal Structure Analyses of 3, 7-Di-t-butyl-3H, 7H-1λ4, 5λ4, 2, 4, 6, 8, 3, 7-dithiatetrazadiarsocine and Bis (diphenylarsino)sulphur DiimideReaction of the salt K2SN2 with organoarsenic chlorides leads to sulphur diimides containing organoarsino substituents at both ends. Single crystal X-ray structure analyses were carried out for two typical compounds, i.e. the cyclic eight-membered 3, 7-di-t-butyl-3H, 7H-1λ4, 5λ4, 2, 4, 6, 8, 3, 7-dithiatetrazadiarsocine (1a, prepared from K2SN2 and (t-Bu)AsCl2 (1:1)) and the open-chain bis(diphenylarsino)sulphur diimide (2a, prepared from K2SN2 and Ph2AsCl (1:2)). In both compounds the sulphur diimide groups are coplanar with their directly bound arsenic atoms. This coplanarity principle leads, in the case of 1a, to about conformation (mm2(C2v) symmetry) of the eight-membered heterocycle; the t-butyl substituents occupy quasi equatorial positions. Small deviations from mm2 symmetry and torsions around the S=N bonds up to 12° can be explained as a consequence of the transnnular repulsion of the lone pairs at the arsenic atoms (As …As distance 3.683(1) Å). In the case of the open-chain S(N—AsPh2)2 (2a, 2(C2) symmetry), a cis, cis configuration was found at the S=N double bonds which indicates As…As interaction. The As…As distance (3.379(1) Å) is shorter than in 1a and parallells a reduced interaction of the lone pairs at the As atoms. The S=N bond lenghts (1.517(5) Å in 1 a and 1.521(3) Å in 2a) are characteristic of sulphur diimides withoug significant π-interaction with the substituents and correspond to SIV=N double bonds.
    Notes: Bei der Umsetzung des Salzes K2SN2 mit Organoarsenchloriden lassen sich beidseitig organylarsino-substituierte Schwefeldiimide erhalten. Für zwei typische Verbindungen, das cyclisch achtgliedrige 3, 7-Di-t-butyl-3H, 7H-1λ4, 5λ4, 2, 4, 6, 8, 3, 7-dithiatetrazadiarsocin (1 a, dargestellt aus K2SN2 und (t-Bu)AsCl2 (1:1)) und das offenkettige Bis(diphenylarsino)schwefeldiimid (2a, dargestellt aus K2SN2 und Ph2AsCl (1:2)) wurden Einkristallröntgenstrukturanalysen durchgeführt. In beiden Verbindungen sind die Schwefeldiimidgruppen mit ihren beiden direkt gebundenen Arsenatomen koplanar. Dieses Koplanaritätsprinzip führt bei 1 a zu einer Wannenkonformation (mm2(C2v)-Symmetrie) des heterocyclischen Achtrings; die t-Butylsubstiuenten besetzen quasieqatoriale Positionen. Geringe Abweichungen von der mm2-Symmetrie und Torsionen um die S=N-Bindungen bis zu 12° können als Folge der transannularen Abstoßung der freien Elektronenpaare an den Arsenatomen (As…As-Abstand 3,683(1) Å) gedeutet werden. Beim offenkettigen S(N—AsPh2)2 (2a, 2(C2)-Symmetrie), wurde überraschenderweise eine cis, cis-Konfiguration der S=N-Doppelbindungen gefunden, die auf eine As…As-Wechselwirkung hinweist. Der gegenüber 1 a signifikant verkürzte As…As-Abstand (3,379(1) Å) geht parallel mit einer Verminderung der Wechselwirkung der freien Elektronenpaare an den As-Atomen. Die S=N-Bindungslängen (1,517(5) Å in 1 a und 1,521(3) Å in 2 a) sind charakteristisch für Schwefeldiimide ohne merkliche π-Wechselwirkung mit den Substituenten und entsprechen SIV=N-Doppelbindungen.
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