ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A source that is compact, durable and mounts on a standard standard ultrahigh vacuum (UHV) flange has been developed for the generation of hyperthermal oxygen atoms. In this source oxygen atoms permeate through an Ag membrane held at 500°C and are then emitted toward the target from the vacuum side of the membrane by electron-stimulated desorption. The current prototype model generates useable O-atom fluxes of ∼1012 atoms cm-2 s-1, and future modifications should increase this flux by 1-3 orders of magnitude. Based on the O+ energy distribution, the average O neutral energy is ∼5 eV with a fairly broad distribution (full width at half-maximum ∼3.6 eV). The information required for the development of this source and the design of the source are prsented.
Additional Material:
11 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740190161
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