ISSN:
1432-0630
Keywords:
81.60
;
82.65
;
82.80
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract A multilayered structure of GaAs and AlGaAs was depth profiled using the technique of digital etching. A single excimer laser (KrF) was used to control the etch rate and to identify each layer by monitoring the Ga ions generated during the desorption process. The Ga ions were the only ions observed and were only generated when the photon flux was in the GaAs layer. The etch rate, 0.9 monolayers (2.5 Å) per pulse, was constant with depth. The overall layer recognition resolution was 45 monolayers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00348233
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