ISSN:
1432-0630
Keywords:
79.20.−m
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The sputtering yield of polycrystalline nickel and chromium was determined as a function of projectile energy (1–8 keV), projectile mass (N+, Ne+, Ar+, Xe+), angle of incidence (0°–75°), and oxygen partial pressure. Where theoretical values exist, the agreement is reasonable.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00616998
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