ISSN:
0142-2421
Keywords:
Environmental AES
;
Electron-Stimulated Desorption
;
insulating surfaces
;
aluminium oxide
;
silicon oxide
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Charging processes on the bulk oxides Al2O3, ZrO2 and SiO2 occurring during Auger Electron Spectroscopy (AES) are studied. All samples experience a negative charge-up under the following parameters: electron beam energy 〉1 keV, current density 〉10-2 A cm-2 and different angles of incidence. The samples show strong history effects as a function of previous irradiation damage. For charge compensation, Environmental Auger Electron Spectroscopy with O2 gas is applied; several traditional methods were applied for comparison. Charging of SiO2 and ZrO2 could be reduced considerably in an O2 environmental pressure of 〈5×10-8 Torr. Charging of Al2O3 could be compensated completely in this oxygen environment. It is shown that for the compensation of the electron beam effects, including electron-stimulated desorption and carbon contamination of the surface, an O2 atmosphere of 5×10-8 Torr is more efficient than using an auxiliary electron gun or low-energy positive ions. It is also more efficient than an Ar environment of 1×10-4 Torr. © 1997 John Wiley & Sons, Ltd.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
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