ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Diamond-like carbon films were synthesized on polished silicon substrates from CH4-H2-H2O mixed gas using a microwave plasma technique. The film properties were studied. Their growth rate was several times as fast as that for CH4-H2 mixed gas under the same experimental conditions. The films have a large Vickers hardness (5000 to 6000 kg mm−2), high electrical resistivity (1012 to 1013 Ω cm) and good optical transparency, especially in the infrared region. Low hydrogen and oxygen contents in the films were detected by secondary ion mass spectroscopy.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00660970
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