ISSN:
1432-2153
Keywords:
Key words: Shock wave, Capacitively coupled RF discharge, Charged particle concentration
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
,
Technology
Notes:
Abstract. The velocity of shock wave propagation in the air plasma of stationary capacitively coupled RF discharge at different gas pressure and charged particles concentration has been measured. It is shown, that the velocity of the shock wave increases at the increase of the concentration. Measurement results are brought to the universal dependence.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s001930050180
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