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  • 1
    Electronic Resource
    Electronic Resource
    Influence of surface structure on surface analytical statements (1992)
    Springer
    Microchimica acta 107 (1992), S. 171-177 
    Details
    ISSN: 1436-5073
    Keywords: depth profile analysis ; surface roughness ; SNMS ; GDOS
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract The influence of surface structure of technical materials on results and statements of surface analytical methods has been investigated. Especially surface roughness as a typical property of rolled products has been observed. For this purpose samples of steel (technical surface, roughness up to 5 μm) and silicon wafers (polished surface) have been analyzed by SNMS and GDOS in order to get information about changes of the surface roughness as function of the sputtering time and their influence on the statements about the depth profiles obtained.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01244470
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