ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Radiation-induced reactions of polystyrene derivatives have been studied by the radiolysis of ring-substituted isopropylbenzene derivatives, i. e., 4-amino. 4-hydroxy, 4-methoxy, 4-methyl, 4-chloromethyl, 4-chloro, and 4-acetyl derivatives. Low-temperature ESR analyses measured at 77 K indicate that. In general, the a-position is the most sensitive site to radiation and that thus a-radicals are produced through a-hydrogen removal. However, among these derivatives, the amino, acetyl, chloromethyl, and. chloro derivatives undergo different reactions from the other derivatives. A phCO—CH3 cleavage from the- acetyl derivative and N—H cleavage from the amino derivative occur, and chlorine removal takes place from the chloro-methyl and chloro derivatives. Final products detected by gas chromatography-mass spectrometry indicate not only that radiation-induced free radical recombination occurs. but also that if chlorine is produced by radiation, hydrogen abstraction by radiation-induced chlorine takes place prior to the free radical recombination. The susceptibility of each derivative to hydrogen abstraction by radiation-induced active chlorine increases, as the electron-donation of ring-substituents is increased. Based on the clarified reaction mechanism, the design of polystyrene derivatives as resist materials is discussed and two new types of resist systems are described. One is a new chloromethylstyrene based blend resist, which is formulated from poly(4-meth-oxystyrene) and poly(4-chloromethylstyrene). The other is a new non-swelling alkaline developable negative resist, which is formulated from poly(4-hydroxystyrene) and a chlorine-releasing compound.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760261608
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