Electronic Resource
Chester
:
International Union of Crystallography (IUCr)
Journal of synchrotron radiation
8 (2001), S. 1054-1055
ISSN:
1600-5775
Source:
Crystallography Journals Online : IUCR Backfile Archive 1948-2001
Topics:
Geosciences
,
Physics
Notes:
A method for the fabrication of linear transmission Fresnel zone plates for X-rays in the 8–15 keV photon energy range is presented. The diffractive elements are generated by electron-beam lithography and chemical wet etching of 〈110〉-oriented silicon membrane substrates. Diffractive structures with aspect ratios of more than 30 for 300 nm-wide structures were obtained. The diffraction efficiency of such a lens was measured for 13.3 keV radiation to be 20%.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1107/S0909049501002746
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