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  • 1
    Electronic Resource
    Electronic Resource
    Beamline and irradiation chamber for dosimetry and biology studies using synchrotron radiation : International conference of synchrotron radiation instrumentation (1989)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 60 (1989), S. 2235-2238 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Ultrasoft x rays are a useful probe for mechanistic studies of radiation damage in living cells. The highly localized energy deposition from a low energy x-ray occurs in a volume comparable to the sensitive biological targets within a cell, so that these low-energy x rays can be used as a tool to investigate radiation effects on the subcellular level. In the ultrasoft x-ray energy region the bright intensity and tunable energy selection of synchrotron radiation is unmatched by conventional sources. A beamline and irradiation chamber for dosimetry and radiation biology studies has been set up at the ES-0 exposure station of the Center for X-ray Lithography at Aladdin. The beamline includes a 10-μm-thick Be entrance window and a combination filter and single synthetically fabricated multilayer mirror for energy selection. The irradiation chamber contains another Mylar window for isolation, a two-dimensional scanning system allowing a 400-cm2 exposure area with scanning rates up to 3.5 cm/s, a rotating feedthrough system that enables motion in the third dimension, several viewports and a specially designed cell sample holder which can be filled with gases at various pressures and holds up to 18 cell culture dishes. The system has been characterized with a gas flow proportional counter to determine energy bandpass and spectral purity and a calorimeter and ionization chamber to assess photon intensity at various energies within the range 500–2000 eV.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1140778
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  • 2
    Electronic Resource
    Electronic Resource
    Beryllium window and acoustic delay line design for x-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography : Proceedings of the 4th international conference on synchrotron radiation instrumentation (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 749-752 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: X-ray lithography systems require sample chambers that can perform exposures in helium gas at atmospheric pressure. The interface between the experimental chamber and the beamline is critical for x-ray lithography and the storage ring. It must allow a high x-ray flux throughput while providing a vacuum barrier so that helium gas does not leak into the beam line and the storage ring. The beam line must also be designed to have protection in the case that a window does fail in order to minimize adverse effects to the ring and other systems. The details of the design for the vacuum system used on beam lines for the Center for X-ray Lithography at the University of Wisconsin Synchrotron Radiation Center 1-GeV electron storage ring are reported. Curved beryllium windows with a 1×5-cm2 aperture and 13 μm thick that have a leak rate less than 10−10 Torr l/s have been successfully used at the experimental chamber beam-line interface. This thin flat beryllium foil is mounted in a curved housing with a wire seal to minimize helium leakage. The window assembly is designed and has been tested to withstand substantial overpressure before failure. If the beryllium window does fail, the beamline has an acoustic delay line that is designed to delay the incoming shock wave of helium gas so that a fast valve at the end of the beam line will close and minimize leakage of helium into the storage ring. The acoustic delay line is designed with baffles to slow the shock front and a secondary thin window to protect against molecular diffusion into the storage ring. The acoustic delay line has been tested to determine the effect of baffle design on delay of the shock wave. A theoretical model that provides a good description of the acoustic delay has also been developed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1142651
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  • 3
    Electronic Resource
    Electronic Resource
    Wisconsin x-ray lithography program (invited) : International conference on synchrotron radiation instrumentation (1989)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 60 (1989), S. 1636-1637 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The facilities and research activities of the University of Wisconsin's Center for X-ray Lithography (CXrL) are outlined. We discuss recent modifications to the two x-ray lithography beamlines operated by CXrL at the Aladdin storage ring. Ongoing research in various aspects of x-ray lithography, including photoresist characterization, mask stability and distortion studies, and modeling of the x-ray lithography process are summarized. We present plans for the expansion of the CXrL research facilities.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141048
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