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  • American Institute of Physics (AIP)  (3)
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  • 1
    Electronic Resource
    Electronic Resource
    Two-dimensional fluid model of an inductively coupled plasma with comparison to experimental spatial profiles (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 2614-2623 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A key need for the development and testing of models suitable for chemically active, low pressure plasmas is detailed comparisons between model predictions and experimental measurements. In this paper, a two-dimensional, axisymmetric fluid model of an inductively coupled plasma is described, and model predictions are compared to the experimental measurements of P. A. Miller, G. A. Hebner, K. E. Greenberg, P. D. Pochan, and B. P. Aragon [J. Res. Natl. Inst. Stand. Technol. 100, 427 (1995)] of electron density, electron temperature, and plasma potential. Comparisons between model predictions and experimental measurements were made in argon and chlorine discharges. Qualitative to semiquantitative agreement between the model predictions and experimental diagnostics was observed, suggesting that assumptions made in the model are reasonably accurate. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.363169
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Spectral emission diagnostics using oxygen impurities in optically thin plasmas (1992)
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 4 (1992), S. 1998-2006 
    Details
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Emission from oxygen in the vacuum ultraviolet (VUV) spectral range from 140 to 260 A(ring) is evaluated as a diagnostic for optically thin plasmas. A one-dimensional Lagrangian, two-fluid hydrodynamic simulation code, which is self-consistently coupled to a comprehensive atomic rate equation model is used for the analysis. This model with the associated atomic rates is described and compared to recent data from laboratory experiments.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.860053
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  • 3
    Electronic Resource
    Electronic Resource
    Flow: A two-dimensional time-dependent hydrodynamical ion extraction model (1992)
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 4 (1992), S. 1447-1456 
    Details
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The simulation of ion extraction from a quasineutral plasma is described using a two-dimensional time-dependent numerical fluid equation code, flow. Ion motion is treated using the cold ion continuity and momentum conservation equations in the potential field of complex structures. An upwind differencing scheme in Cartesian coordinates is used to solve these fluid equations. The plasma electrons are modeled as having a Maxwell–Boltzmann distribution, which allows for ion acoustic effects inside the plasma. The growth and evolution of two-dimensional ion sheaths is treated while evaluating the ion flux collected on the extractor surface. It is found that spatial grids very much coarser than the Debye length (of order ten times larger or greater) can be successfully used to accurately model ion extraction. Although the transition region between the high density quasi-neutral plasma and the ion sheath is not resolved, the ion flux across this region is still obtained correctly. The assumption of a Maxwell–Boltzmann distribution for the electrons requires the solution of a highly nonlinear Poisson equation. Previous approaches to this problem have relied upon a Newton–Raphson root search with standard iterative techniques for the resulting linearized equations. A new methodology is described here using the recently developed strongly implicit procedure (SIP), which has been optimized for the discretized two-dimensional Laplace operator.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.860055
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