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  • American Institute of Physics (AIP)  (2)
  • 1
    Electronic Resource
    Electronic Resource
    Fast photoelectrochemical etching of quarter-micrometer diffraction gratings in n-InP (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 3402-3406 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A maskless etch process for diffraction gratings in n-InP is described in detail which permits simple and reliable large-area fabrication of gratings for distributed feedback (DFB) or Bragg-reflector (DBR) lasers. With respect to processes reported earlier the exposure and etching times are reduced by an order of magnitude without sacrificing resolution, modulation depth, or surface morphology. In accordance with the recently published diffusion theory for minority-carriers generated under holographic illumination, a high etch rate is found to be advantageous with respect to high spatial resolution. In addition, however, the results demonstrate that the chemical stability of the In-rich (211) and (111) planes as against the (100) surface is of final importance for obtaining good first-order DFB gratings.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.341495
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    In situ fabrication of InP-based optical waveguides by excimer laser projection (1993)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 63 (1993), S. 1137-1139 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We describe the preparation of InGaAsP/InP optical rib waveguides by maskless excimer laser projection etching. The process is based on the spontaneous chemical reaction of Cl2 etch gas with the InP surface at room temperature and subsequent laser-induced chloride evaporation. The spatial resolution is at least 1 μm. A typical etch rate is 0.45 nm/pulse or 540 nm/min at 20 Hz pulse repetition rate. Due to smooth surfaces, the optical attenuation of laser-etched waveguides is equivalent to that of conventionally etched guides. To demonstrate the utility of the process, we have also designed and successfully fabricated directional couplers from the same waveguide type according to the effective index method.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.109804
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