Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
57 (1986), S. 937-940
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A UHV apparatus equipped with two high-power electron guns is extended with a multichannel quadrupole mass spectrometer which accurately controls the deposition rate. A rotating substrate holder is used for deposition of multilayers at room temperature; a fixed substrate holder enables one to prepare layered structures at liquid N2 temperature. A home-built load lock in combination with an extended travel sample manipulator permits a rapid change of the samples without breaking vacuum. The system has been used to deposit Nb/Cu and Pb/Ge multilayers and preliminary structural measurements indicate the samples are of high quality.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1138838
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