ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Thermal chemical vapor deposition was used to deposit fluorocarbon films with chemical resemblance to bulk polytetrafluoroethylene. X-ray photoelectron spectroscopy revealed that the films deposited from thermal decomposition of hexafluoropropylene oxide had fluorine to carbon ratios of 2.0 and CF2 fractions of 90% along with 10% of CF3 and CF moieties. Electron spin resonance results found the dangling bond density to be 1.2×1018 spins/cm3, low compared to conventional plasma polymerized films. Low dangling bond densities were achieved by using a clean source of CF2 in the absence of plasma source. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.116332
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