Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
87 (2000), S. 8747-8753
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A simple theoretical approach is proposed to predict the periodicity and thickness of multilayers synthesized by a hypothetical multitarget sputtering process. A sputtering technique involving two separated targets is investigated first. Assuming some physical and chemical properties of the bulk materials and taking into account the geometry and operating conditions imposed by the process, some mathematical relationships can be deduced to determine the alternations and dimensions of each sublayer as well as the final thickness of the coating. An extension of the proposed model is therefore developed for a process involving any target number which enables us to establish the experimental setup required to synthesize any period. The advantages and weaknesses of the theoretical analysis due to some simplifying assumptions are discussed and some improvements are also suggested. The influence of some process parameters on some characteristics of the materials, especially density, are studied so as to show that their effect can also be added to the presented theory. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.373605
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