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  • 1
    Electronic Resource
    Electronic Resource
    Microhollow cathode discharge excimer lamps : The 41st annual meeting of the division of plasma physics of the american physical society (2000)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 7 (2000), S. 2186-2191 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 μm range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer radiation was found to increase monotonically with pressure. However, due to the decrease in source size with pressure, the efficiency (ratio of excimer radiant power to input electrical power), has for xenon and argon fluoride a maximum at ∼400 Torr. The maximum efficiency is between 6% and 9% for xenon, and ∼2% for argon fluoride. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.874039
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  • 2
    Electronic Resource
    Electronic Resource
    Series operation of direct current xenon chloride excimer sources (2000)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 3220-3224 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Stable, direct current microhollow cathode discharges in mixtures of hydrochloric acid, hydrogen, xenon, and neon have been generated in a pressure range of 200–1150 Torr. The cathode hole diameter was 250 μm. Sustaining voltages range from 180 to 250 V at current levels of up to 5 mA. The discharges are strong sources of xenon chloride excimer emission at a wavelength of 308 nm. Internal efficiencies of approximately 3% have been reached at a pressure of 1050 Torr. The spectral radiant power at this pressure was measured as 5 mW/nm at 308 nm for a 3 mA discharge. By using a sandwich electrode configuration, consisting of five perforated, alternate layers of metal and dielectric, a tandem discharge—two discharges in series—could be generated. For an anode–cathode–anode configuration the excimer irradiance, recorded on the axis of the discharge, was twice as large as that of a single discharge. The extension of this basic tandem electrode structure to a multiple electrode configuration allows the generation of high irradiance excimer sources. Placing such a structure with a string of microhollow cathode discharge into an optical resonator promises to lead to a direct current microexcimer laser. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1288699
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