ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
A compact near field optical microscope module is presented, with shear-force detection based on an external cavity laser interferometer. Its Al2O3 structure allows minimal sensitivity towards thermal and mechanical perturbations. Together with a precise and easy-to-handle tip fixation system, involving standard commercially available elements, this module is simple to use, and allows to detect a minimum displacement of 5.9 pmrms/Hz, with a large working distance of 10.5 mm. © 1997 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1148450
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