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  • 42.80  (1)
  • critical parameters  (1)
  • entry length  (1)
  • Springer  (3)
  • American Association of Petroleum Geologists (AAPG)
  • Oxford University Press
  • Washington, DC : United States Gov. Print. Off.
Collection
Keywords
Publisher
  • Springer  (3)
  • American Association of Petroleum Geologists (AAPG)
  • Oxford University Press
  • Washington, DC : United States Gov. Print. Off.
Years
  • 1
    Electronic Resource
    Electronic Resource
    Theory and practice of image formation by the photoprojection method of submicron patterns (1978)
    Springer
    Applied physics 16 (1978), S. 279-287 
    Details
    ISSN: 1432-0630
    Keywords: 42.80 ; 85.30
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Optical projection of masks is a very troublesome task if dimensions are in the submicron range. It is difficult to get an undistorted image in the resist. This problem can be overcome by introducing corrections in the penultimate mask. Till now this has been done by a trial and error method in which an acceptable pattern is made only after a time consuming iterative process. In this paper a description will be given of the image forming process in which diffraction at the penultimate mask and at the aperture of the lens are the critical features. Based upon this theory correction formulas are derived for the direct design of penultimate masks. Rules for maximum edge sharpness are given, so that the tolerance demands on the production process can be relaxed. Extensive experimental measurements are in good agreement with theory. It will be shown theoretically as well as practically that by asymmetrical arrangement of the optical system images of gratings with 0.2–0.3 μm linewidth can be obtained.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00885123
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Thermal effects in compressible viscous flow in a capillary (1993)
    Springer
    International journal of thermophysics 14 (1993), S. 865-892 
    Details
    ISSN: 1572-9567
    Keywords: capillary flow ; compressible flow ; entry length ; expansion cooling ; temperature field ; viscous dissipation
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract The thermal effects for a compressible viscous flow in a capillary have been calculated by solving the equation of energy, where a parabolic profile is assumed for the axial flow velocity. It is shown that, in general, the temperature changes are small (a few millikelvins), consistent with the current assumption of an isothermal flow, except in the case of a critical, i.e., very compressible, fluid where the cooling can be substantial. This effect is demonstrated numerically on the basis of a flow of ethylene in nearly critical circumstances.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00502113
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Critical parameters of mixtures of carbon dioxide and ethane (1992)
    Springer
    International journal of thermophysics 13 (1992), S. 1043-1052 
    Details
    ISSN: 1572-9567
    Keywords: carbon dioxide ; critical parameters ; critical phenomena ; ethane ; plait point
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract This paper deals with an evaluation of the critical parameters reported for mixtures of carbon dioxide and ethane. Equations are presented for the critical parameters as a function of the concentration.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01141214
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    Paper (German National Licenses)
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