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  • 7.75  (1)
  • Springer  (1)
  • American Association for the Advancement of Science (AAAS)
  • American Physical Society (APS)
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  • Springer  (1)
  • American Association for the Advancement of Science (AAAS)
  • American Physical Society (APS)
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    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 56 (1993), S. 385-390 
    ISSN: 1432-0630
    Keywords: 7.75 ; 78.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A sensitive interferometric technique has been applied for studying the thermal displacement of thin film heated by electron or ion beams. The steady state displacement has been measured and we discuss the dependence on material properties and film thickness showing that this method has a potential for in-situ monitoring of thin-film deposition or etching. Transient effects are studied in a thin quartz plate and the propagation velocity of thermal waves is measured.
    Type of Medium: Electronic Resource
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