ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A two-dimensional capacitive position transducer is described which has x, y and angular outputs and a fixed zero. The prototype has submicron and arcsecond sensitivity, 10 mm range, and a nonlinearity of 0.1%, which is easily corrected to 0.01%. The transducer employs a synthetic dual full-bridge technique and is compact, easily fabricated, and suitable for use in cryogenic environments.© 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148273
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