ISSN:
1432-0630
Keywords:
79.20
;
61.80
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The transmission sputtering yield of gold for 6.8-MeV Au– bombardment has been measured on targets of thicknesses from 250 to ∼ 7000 Å. The results are compared to Sigmund's theory and to recent calculations of deposited-energy depth distributions by Winterbon. Good agreement between experimental data and theory is found except for target thicknesses around 4000 Å, where the experimental yield rises by up to a factor two higher than predicted by theory. This discrepancy is interpreted in terms of collision spikes, which have been observed previously in backsputtering experiments.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00897068
Permalink
