Publication Date:
2019-07-13
Description:
Measurement technology for semiconductor materials, process control, and devices, is discussed. Silicon and silicon based devices are emphasized. Highlighted activities include semiinsulating GaAs characterization, an automatic scanning spectroscopic ellipsometer, linewidth measurement and coherence, bandgap narrowing effects in silicon, the evaluation of electrical linewidth uniformity, and arsenicomplanted profiles in silicon.
Keywords:
SOLID-STATE PHYSICS
Type:
NASA-CR-169106
,
NAS 1.26:169106
,
PB82-135898
,
NBSIR-81-2230-3
Format:
application/pdf
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