ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
This paper present a method for determing the sputtering yield of a material bombarded by an ion beam, using a 3D stylus surface mapping system. Data obtained of copper are discussed. The influences on the sputtering yield of progressive addition of zinc is observed. The results are in good agreement with previous theoretical results.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740090208
Permalink