ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Many styrylpyridinium compounds (SPC), which are very stable in the dark, were prepared and evaluated as photobleachable dyes for contrast enhanced lithography (CEL). The photobleaching characteristics of water-soluble contrast enhancing materials composed of SPC and water-soluble polymer depend on the structure of the SPC and the kind of polymers used. The technique using SPC-based CEL proved to be very effective for the resist pattern profiles.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760291403
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