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  • 1990-1994  (6)
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  • 1
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    Diamondlike carbon applications in infrared optics and microelectronics (1990)
    In:  CASI
    Details
    Publication Date: 2013-08-31
    Description: The use of diamondlike carbon (DLC) as a protective coating in harsh environments is addressed. There are three topics presented. The first is a description of the preparation of DLC on seven different infrared transmitting materials, and the possibility of using DLC as an antireflecting coating at commonly used wavelengths. DLC doesn't bond easily to all materials, and special techniques for bonding are presented. The second topic deals with how well DLC will protect a substrate from moisture penetration. This is an important aspect in numerous uses of DLC, including both infrared optics and integrated circuits. The third topic is the effect of particulate impact on film performance and integrity.
    Keywords: OPTICS
    Type: Solid State Technology Branch of NASA Lewis Research Center Second Annual Digest, June 1989 - June 1990; p 246-276
    Format: application/pdf
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  • 2
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    Optical dispersion relations for diamondlike carbon films (1990)
    In:  CASI
    Details
    Publication Date: 2013-08-31
    Description: Ellipsometric measurements on plasma deposited diamondlike amorphous carbon (a-C:H) films were taken in the visible, (E = 1.75 to 3.5 eV). The films were deposited on Si and their properties were varied using high temperature (up to 750 C) anneals. The real (n) and imaginary (k) parts of the complex index of refraction, N, were obtained simultaneously. Following the theory of Forouhi and Bloomer, a least squares fit was used to find the dispersion relations n(E) and k(E). Reasonably good fits were obtained, showing that the theory can be used for a-C:H films. Moreover, the value of the energy gap, Eg, obtained in this way was compared the the Eg value using conventional Tauc plots and reasonably good agreement was obtained.
    Keywords: OPTICS
    Type: Solid State Technology Branch of NASA Lewis Research Center Second Annual Digest, June 1989 - June 1990; p 240-245
    Format: application/pdf
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  • 3
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    Diamondlike carbon as a moisture barrier and antireflecting coating on optical materials (1990)
    In:  CASI
    Details
    Publication Date: 2019-06-28
    Description: Diamondlike carbon (DLC) is amorphous, hard, semitransparent, and is under consideration for use as a coating material for infrared optics. DLC is also designated as a-C:H to indicate its amorphous nature as well as to indicate the presence of large (20 to 55 percent) amounts of hydrogen in the film. Two important questions arise with respect to use of DLC in infrared optics. Will the lack of grain boundaries help to keep moisture from penetrating the film. Secondly, application as an antireflection coating places restrictions on the allowed values of the index of refraction of the film relative to the particular substrate material being used. Will DLC have the correct index range. These two questions are addressed in this paper.
    Keywords: NONMETALLIC MATERIALS
    Type: Solid State Technology Branch of NASA Lewis Research Center Second Annual Digest, June 1989 - June 1990; p 232-237
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  • 4
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    Amorphous-Carbon Films (1993)
    In:  Other Sources
    Details
    Publication Date: 2019-07-12
    Description: Report describes structure, preparation, characterization, and applications of films of amorphous-carbon. Amorphous-carbon films potentially useful as masks in x-ray lithography, layers for passivation of high-speed microelectronic circuits, hard films to protect magnetic recording media and optical components from degradation by chemical etching or wear, and radiation detectors.
    Keywords: MATERIALS
    Type: LEW-15298 , NASA Tech Briefs (ISSN 0145-319X); 17; 7; P. 89
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  • 5
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    Synthesis, Properties, and Applications Of Boron Nitride (1993)
    In:  Other Sources
    Details
    Publication Date: 2019-07-12
    Description: Report describes synthesis, properties, and applications of boron nitride. Especially in thin-film form. Boron nitride films useful as masks in x-ray lithography; as layers for passivation of high-speed microelectronic circuits; insulating films; hard, wear-resistant, protective films for optical components; lubricants; and radiation detectors. Present status of single-crystal growth of boron nitride indicates promising candidate for use in high-temperature semiconductor electronics.
    Keywords: MATERIALS
    Type: LEW-15299 , NASA Tech Briefs (ISSN 0145-319X); 17; 7; P. 88
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  • 6
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    Properties Of Plasma-Deposited Amorphous Hydrogenated Carbon (1992)
    In:  Other Sources
    Details
    Publication Date: 2019-07-12
    Description: Report reviews experimental research on plasma-deposited films of hydrogenated amorphous carbon. Such films exhibit electrical resistivity, semi-transparency, mechanical hardness, and chemical inertness. Useful as gate dielectrics and passivating layers in semiconductor devices, insulators for metal/insulator/metal devices, and masks in nanometer lithography. Show promise as wear-resistant, hard solid lubricating coats for bearings and optical components.
    Keywords: MATERIALS
    Type: LEW-15095 , NASA Tech Briefs (ISSN 0145-319X); 17; 4; P. 59
    Format: text
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