ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
Filter
  • 1990-1994  (29)
  • 1
    Electronic Resource
    Electronic Resource
    Ion drag on an isolated particulate in a low-pressure discharge (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 7195-7202 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Classical scattering theory is used to calculate momentum-transfer cross sections between positive ions and isolated particulates in glow discharges for several model particle sheath potentials. Cross sections calculated from a potential profile obtained using self-consistent orbit (Poisson–Vlasov) theory, an attractive screened Coulomb potential, and an attractive cutoff Coulomb potential are compared. At high ion energies, all model potentials result in the same cross-section dependence on ion energy. At low ion energies, however, the cutoff Coulomb potential gives a cross section too low by about a factor of 10. The screened Coulomb potential and Poisson–Vlasov theory potential result in momentum-transfer cross sections equal to within 30% over the entire range of ion energies. An approximate analytic expression for the momentum transfer rate coefficient is given for order of magnitude estimation of the ion drag force.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.352392
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Sheath structure around particles in low-pressure discharges (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 3934-3942 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Collisionless orbit theory is used to model isolated particles in low-pressure discharges with and without the presence of negative ions. The key results are as follows: (1) Debye–Hückel theory works well for approximating the potential profile around the particle, and (2) the size of the sheath around the particle is determined by a Debye length that results from linearizing the Poisson–Vlasov equation. These results are valid as long as the ratio of particle radius to Debye length is small and the ratio of Debye length to mean free path is small.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.352245
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 3
    Electronic Resource
    Electronic Resource
    Electrostatic forces on small particles in low-pressure discharges (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 1617-1620 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The electrostatic forces on an isolated particulate in a low-pressure discharge are calculated assuming a screened Coulomb potential profile for the particle sheath. In the absence of particle sheath distortion due to a flowing plasma and assuming that there is no charge "bound'' to the particle in the form of ions in trapped orbits, the monopolar and dipolar forces on the particle are essentially identical to the corresponding forces on a charged sphere in vacuum.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.353194
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 4
    Electronic Resource
    Electronic Resource
    Self-consistent dc glow-discharge simulations applied to diamond film deposition reactors (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 5189-5198 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Self-consistent particle-fluid hybrid simulations have been used to study the structure of hydrogen dc discharges between parallel plates. A Monte Carlo simulation is used to describe individual energetic electrons in the cathode sheath, while the electrons and ions in the low-field region of the discharge are modeled as a fluid. Simulation results for pure H2 discharges at conditions typical in diamond growth (approximately 20–30 Torr at 1000 K, 100–200 A m−2) are in reasonable agreement with optical emission and Langmuir probe measurements. The space potential in these discharges is negative with respect to the anode, unlike comparable discharges at lower pressures. Anode glows are predicted by the simulation and are observed experimentally. Dissociation of H2 in the anode region contributes significantly to the flux of atomic hydrogen to the anode, where diamond is typically grown.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.350575
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 5
    Electronic Resource
    Electronic Resource
    Particle thermophoresis in low pressure glow discharges (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 6923-6934 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Particles in glow discharges are charged negatively and are therefore often suspended electrostatically since the plasma potential is usually more positive than the potential of surfaces bounding the plasma. However, in addition to responding to electrostatic and gravitational forces, particles are sensitive to forces associated with gradients in neutral gas temperature. A series of experiments were performed varying the temperature of water circulated through planar, parallel electrodes. When particles are present and are suspended in the discharge, they move away from a heated electrode and towards a cooled electrode. In the absence of particles, the discharge optical emission spatial profile and electrical characteristics did not change significantly for any combination of electrode heating or cooling. Particles remaining in the interelectrode gap after the discharge is extinguished appear to be uncharged. With particles present, the discharge electrical properties and time- and space-resolved optical emission take on characteristics associated with discharges in electron attaching gases. We report on a simple particle-scavenging arrangement based on thermophoresis that can be used to remove particles from a discharge.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.347630
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 6
    Electronic Resource
    Electronic Resource
    A comparison of particle in cell and fluid model simulations of low-pressure radio frequency discharges (1994)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 76 (1994), S. 5646-5660 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A comparison is made between particle-in-cell model (PIC) and fluid model simulations of a radio frequency (rf) gaseous discharge containing a helium model gas. The agreement in the discharge properties predicted by the two models is examined over a range of pressures and applied voltages. It is found that there is quantitative agreement in the overall discharge behavior predicted by the PIC and fluid simulations at pressures above 100 mTorr and applied voltages up to 800 V. With the exception of the ion energy at the electrodes, the two models also agree in their prediction of the scaling of discharge properties as a function of the applied voltage. Below 100 mTorr, disagreement in the period-averaged electron heating predicted by each model leads to differences in the predicted discharge properties. The estimate for the electron power input prediction can be improved in the fluid simulation by including an analytic expression for stochastic heating in the electron energy balance equation.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.358435
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 7
    Electronic Resource
    Electronic Resource
    Particle-plasma interactions in low-pressure discharges (1990)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 57 (1990), S. 2077-2079 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Spatial profiles of size and number density of aluminum particles in argon plasmas have been measured. Angular dissymmetry laser light scattering indicates that larger particles tend to segregate towards the anodic plasma-sheath boundary; however, the larger particles ((approximately-greater-than)400 nm diameter) near this boundary are present in number densities lower than those closer to the center of the discharge, where particles are smaller (∼300 nm). Nonspherical particle aggregates appear to form near the plasma-sheath interface under some conditions. Optical emission intensity and positive ion number density are reduced in discharges with particles as compared to discharges without particles.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.103946
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 8
    Electronic Resource
    Electronic Resource
    Dynamic measurements of film thickness over local topography in spin coating (1990)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 56 (1990), S. 2348-2350 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A technique is presented for making real-time, in situ measurements of film thickness profiles over local topography during spin coating. A laser is pulsed synchronously with the rotation of a spinning wafer to illuminate a microscope focused on a local feature being coated on the wafer. Interference fringes are captured photographically to allow observation of film thickness contours from initial spin-up to the final dried film. With this method we can observe the influcence of flow direction and microscopic feature shape and orientation on film profiles during the spinning and drying processes in spin coating.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.102913
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 9
    Electronic Resource
    Electronic Resource
    Electron heating in low-pressure rf glow discharges (1990)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 56 (1990), S. 1022-1024 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Particle-in-cell simulations of radio frequency glow discharges between parallel-plate electrodes were performed to test the role of secondary emission at applied frequencies above the ion plasma frequency. With the secondary electron emission coefficient set to zero, the high-energy tail of the electron energy distribution function in the center of the glow is modulated at the applied frequency, and these energetic electrons show substantial anisotropy. In addition, a pulse of ionization propagates across the glow, correpsonding to the directed velocity of the high-energy electrons in the center of the glow. These high-energy electrons originate at the plasma-sheath boundary and appear to be the result of sheath heating.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.102604
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 10
    Electronic Resource
    Electronic Resource
    Capacitively coupled glow discharges at frequencies above 13.56 MHz (1991)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 59 (1991), S. 2091-2093 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Particle-in-cell/Monte Carlo simulations of glow discharges between parallel plate electrodes indicate that operation at frequencies above 13.56 MHz offers a number of attractive features for plasma processing applications. Plasma density and ion current scale approximately as the square of frequency, but maximum ion energy is unaffected to first order when applied voltage, pressure and electrode spacing remain constant. In addition, raising frequency decreases sheath thickness, thereby increasing ion directionality in the sheath at constant pressure. By manipulating both frequency and rf voltage, it is possible to control ion current and energy independently.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.106112
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...