ISSN:
0887-624X
Keywords:
excimer laser
;
organosilicon compounds
;
additive-free polymers
;
high chemical and spectral purity
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
Excimer lasers (ArF, λ = 193 nm, and KrF, λ = 248 nm) were used to generate polymers free of additives such as catalysts, initiators, or sensitizers. The layers obtained are of potential interest for medical applications and future molecular electronics. Dimethylpolysiloxanes and dimethylsiloxane copolymers that contain phenyl-, n-hexyl- or 3.3.3-trifluoropropyl groups or silicon-bound hydrogen atoms were crosslinked in the liquid phase, whereby layer thicknesses in the range from 1-300 μm were obtained. Disiloxanes and alkoxysilanes were deposited from the gas phase (LCVD, laser chemical vapor deposition) resulting in layer thicknesses below 1 μm. In almost all cases, organic layers with a smooth surface, transparency, and good adhesion were obtained on silicon as well as quartz substrates. © 1994 John Wiley & Sons, Inc.
Additional Material:
1 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pola.1994.080321010
Permalink