ISSN:
0392-6737
Keywords:
Impact phenomena (including electron spectra and sputtering)
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Summary The energy distribution of reflected ions at normal incidence of the primary beam on the target surface is obtained as a result of approximate solution of the Boltzmann equation by the method of discrete streams. This method gives the opportunity to avoid the problem of negative distribution function, arising in the generally applied method of spherical harmonics, and to present the final result in analytical form. The analysis is performed for a power scattering cross-section and the theoretical energy distribution demonstrates one maximum when the ion mass is equal to the mass of a target atom, and two maxima when the ion mass is much less than the mass of a target atom.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02457320
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