Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
69 (1998), S. 460-462
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We demonstrate an optical two-beam deflection setup for in situ stress measurements in thin films. By using improved position sensitive photodetectors we reach a resolution of better than 10−4 m−1 for substrate curvature measurement at a bandwidth of 1 kHz, with a relatively short optical path of 0.53 m and without employing a lock-in technique. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148721
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