Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
80 (2002), S. 353-355
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1432747
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