Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
88 (2000), S. 2415-2422
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We report characterization of the average Ti atomic bonding environment in Ti-containing hydrocarbon (Ti–C:H) coatings by x-ray absorption near edge structure (XANES) spectroscopy, extended x-ray absorption fine structure (EXAFS) spectroscopy, and high-resolution transmission electron microscopy (TEM). Ti–C:H coatings have been synthesized in a hybrid chemical vapor deposition/physical vapor deposition deposition system, which combines inductively coupled plasma and sputter deposition. Combining x-ray absorption spectroscopy with high resolution TEM imaging, we have determined that the dissolution limit of Ti atoms in an amorphous hydrocarbon (a-C:H) matrix is between 0.9 and 2.5 atomic percent. At Ti compositions 〉2.5 at. %, XANES and EXAFS data indicate that the average Ti atomic bonding environment in Ti–C:H resembles that in cubic B1–TiC, consistent with direct TEM observation of the precipitation of TiC nanocrystallites in an a-C:H matrix. Beyond the Ti dissolution limit, Ti–C:H coatings are in fact TiC/a-C:H nanocomposites, in which the TiC nanoprecipitates are very much bulk like. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1287121
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