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  • 2000-2004  (1,125)
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  • 1
    Publication Date: 2003-05-01
    Print ISSN: 1359-6462
    Electronic ISSN: 1872-8456
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Published by Elsevier
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  • 2
    Publication Date: 2001-01-01
    Print ISSN: 0149-1423
    Electronic ISSN: 1943-2674
    Topics: Geosciences
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 91 (2002), S. 3539-3546 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: This article reports a simulation of argon inductively coupled plasma. Experimental measurements of the electron energy distribution function (EEDF) are fit to a power-law model and used to calculate electron impact rate coefficients in the simulation. Simulation results are compared to experimental measurements of electron density and temperature with good agreement, especially at the lower pressures investigated. At higher pressures, the disagreement between experiment and model is analyzed in terms of the nonlocality of the EEDF. Diffusive transport, neutral heating, gas phase electron impact reactions, and surface quenching all contribute to the predicted metastable profiles. Predicted metastable densities and neutral gas temperatures are compared to experimental results from the literature with reasonable agreement. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 3748-3755 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Surface recombination coefficients of O and N radicals in pure O2 and N2 plasmas, respectively, have been estimated on the stainless steel walls of a low-pressure inductively coupled plasma reactor. The recombination coefficients are estimated using a steady state plasma model describing the balance between the volume generation of the radicals from electron-impact dissociation of the parent molecules, and the loss of the radicals due to surface recombination. The model uses radical and parent molecule number densities and the electron energy distribution function (EEDF) as input parameters. We have measured the radical number density using appearance potential mass spectrometry. The parent neutral number density is measured using mass spectrometry. The EEDF is measured using a Langmuir probe. The recombination coefficient of O radicals on stainless steel walls at approximately 330 K is estimated to be 0.17±0.02, and agrees well with previous measurements. The recombination coefficient of N radicals is estimated to be 0.07±0.02 on stainless steel at 330 K. © 2000 American Institute of Physics.
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 87 (2000), S. 4098-4106 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A tuned, cylindrical Langmuir probe has been used to measure the electron energy distribution function (EEDF) in atomic and molecular gases in an inductively coupled plasma. We have discussed the precautions necessary for making Langmuir probe measurements in fluorocarbon plasmas. The ionic and neutral composition of the plasma is measured using mass spectrometry. While the EEDFs in argon are non-Maxwellian, the EEDFs in molecular gases are found to be approximately Maxwellian at low pressures (〈20 mTorr) in the gases studied (N2, O2, CF4). The EEDFs in argon–molecular gas mixtures change from Maxwellian to two-temperature distributions, as the fraction of argon is increased in the plasma. At higher pressures, the molecular gases exhibit EEDFs reflecting the electron collision cross sections of these gases. In particular, N2 plasmas show a "hole" in the EEDF near 3 eV due to the resonant vibrational collisions. O2 plasmas show a three-temperature structure, with a low-energy high-temperature electron group, a low-temperature intermediate-energy electron group, and a high-temperature high-energy tail. The fractional degree of dissociation in the N2 and O2 plasmas is below 0.1, with the parent molecules and molecular ions being the dominant species. The spatial variation of the EEDF in an oxygen plasma at low pressures (10–20 mTorr) is found to be consistent with the nonlocal theory. © 2000 American Institute of Physics.
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  • 6
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Electrically conducting, cylindrical liquid bridges in a density-matched, electrically insulating bath were stabilized beyond the Rayleigh–Plateau (RP) limit using electrostatic stresses applied by concentric ring electrodes. A circular liquid cylinder of length L and radius R in real or simulated zero gravity becomes unstable when the slenderness S=L/2R exceeds π. The initial instability involves the growth of the so-called (2, 0) mode of the bridge in which one side becomes thin and the other side rotund. A mode-sensing optical system detects the growth of the (2, 0) mode and an analog feedback system applies the appropriate voltages to a pair of concentric ring electrodes positioned near the ends of the bridge in order to counter the growth of the (2, 0) mode and prevent breakup of the bridge. The conducting bridge is formed between metal disks which are grounded. Three feedback algorithms were tested and each found capable of stabilizing a bridge well beyond the RP limit. All three algorithms stabilized bridges having S as great as 4.3 and the extended bridges broke immediately when feedback was terminated. One algorithm was suitable for stabilization approaching S=4.493... where the (3, 0) mode is predicted to become unstable for cylindrical bridges. For that algorithm the equilibrium shapes of bridges that were slightly under or over inflated corresponded to solutions of the Young–Laplace equation with negligible electrostatic stresses. The electrical conductivity of the bridge liquid need not be large. The conductivity was associated with salt added to the aqueous bridge liquid. © 2000 American Institute of Physics.
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 3889-3898 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A cylindrical Langmuir probe has been used to measure the electron energy distribution function (EEDF) in atomic and molecular gases in a shielded inductively coupled plasma. We report the EEDFs in these gases as a function of pressure. While the electron properties in a discharge depend on the product of the neutral number density (N0) and the effective discharge dimension (deff) for a given gas, this dependence is different for different gases. We find that pressure is a convenient parameter for comparison of the EEDFs in these gases. The EEDFs in inert (Ar, Kr, Xe) and molecular gases (H2,N2,O2,H2O,CO2,CF4) in the low pressure limit (below 1 mTorr) show a "three-temperature" structure. Since this wide range of gases display similar EEDF shape, we propose this structure to be common to all gas discharges in this limit. The EEDF in all of the gases shows a two-temperature structure with apparent tail depletion at 3 mTorr. The similarity of the EEDFs in all of the above gases is probably due to nonlocality of the electrons at these low pressures. The molecular gases exhibit a nearly Maxwellian EEDF between about 10 and 30 mTorr, while the EEDF in argon is non-Maxwellian in this range. At pressures above 30 mTorr, the EEDFs in molecular gases show deviations from a Maxwellian distribution, reflecting the electron-neutral collision cross sections of each gas. The EEDFs in molecular gases at 100 mTorr show significant deviations from a Maxwellian distribution. We find that the EEDF in molecular gases can be approximated by a Maxwellian distribution over a fairly large pressure range of 3–50 mTorr for the purposes of modeling these discharges. © 2000 American Institute of Physics.
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  • 8
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 3734-3738 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Comparative analyses of molecular dynamics (MD) simulation studies of reactive ion etching of Si are presented. A recently developed empirical potential is used to model the Si–F system, and applied to the simulation of Si etching with energetic F+ at 10, 25 and 50 eV. These results are compared to those of a similar study using the Stillinger-Weber Si–F potential. This analysis leads to the expected result that different potentials lead to quantitatively different results with regard to Si etch yield, surface structure and composition, etching mechanisms, and product distributions. More importantly, however, it attests to the robustness of the qualitative nature of these results. The degree of qualitative agreement between systems studied with the two potentials is high enough for us to conclude that MD simulations have revealed valuable qualitative insights into the complicated system of reactive ion etching of Si. © 2000 American Institute of Physics.
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  • 9
    Electronic Resource
    Electronic Resource
    Boston, USA and Oxford, UK : Blackwell Publishers Inc.
    Risk analysis 20 (2000), S. 0 
    ISSN: 1539-6924
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Energy, Environment Protection, Nuclear Power Engineering
    Notes: Toxicologists are often interested in assessing the joint effect of an exposure on multiple reproductive endpoints, including early loss, fetal death, and malformation. Exposures that occur prior to mating or extremely early in development can adversely affect the number of implantation sites or fetuses that form within each dam and may even prevent pregnancy. A simple approach for assessing overall adverse effects in such studies is to consider fetuses or implants that fail to develop due to exposure as missing data. The missing data can be imputed, and standard methods for the analysis of quantal response data can then be used for quantitative risk assessment or testing. In this article, a new bias-corrected imputation procedure is proposed and evaluated. The procedure is straightforward to implement in standard statistical packages and has excellent operating characteristics when used in combination with a marginal model fit with generalized estimating equations. The methods are applied to data from a reproductive toxicity study of Nitrofurazone conducted by the National Toxicology Program.
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  • 10
    Electronic Resource
    Electronic Resource
    Westerville, Ohio : American Ceramics Society
    Journal of the American Ceramic Society 85 (2002), S. 0 
    ISSN: 1551-2916
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Room-temperature tensile properties were measured for two thin C–SiC composites fabricated from single sheets of carbon fiber fabric with nominally the same weave architecture, but different fiber packing densities. The SiC matrixes were formed by infiltration and pyrolysis of a polymer precursor (allylhydridopolycarbosilane). The tensile properties are related to microstructural characteristics, observed damage mechanisms, and measurements of local strain concentrations by speckle interferometry. Differences are observed between the responses of these thin-sheet composites and conventional CVI-matrix composites of larger thickness. Debonding between transverse and longitudinal fiber tows allows significant strains due to straightening of initial wavy fiber tows and leads to local stress concentrations. The strength and elastic modulus are affected by the waviness of the longitudinal tows.
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