ISSN:
1436-5073
Keywords:
Key words: Co/Cu multilayer; PLD; analytical TEM; EELS; EDXS; AES depth profiles.
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract. Concentration profiles of sputtered and pulsed laser deposited nanoscale Co/Cu multilayers have been measured by EDXS and EELS line scans in scanning mode at electron microscopic cross section foils and by AES depth profile analysis. The interpretation of the results has been supported by model calculations. After deposition, the pulsed laser deposited multilayers are stronger mixed than the sputtered layers. They decompose during annealing.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s006040070082
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