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Quadrupole ion pump performance characteristics. (1972)

Schwarz, H.

In: Other Sources

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Publication Date: 2019-06-27

Description: A new nonmagnetic ion pump is described that resembles a quadrupole ionization gauge. The dimensions are larger, and hyperbolically shaped electrodes replace the four rods. Pumping speeds (4-100 liters per sec) for different gases at various peak voltages (1000-3000 V) at corresponding frequencies (57-100 MHz) and at different pressures (10 microtorr to 1 nanotorr) are reported.

Keywords: INSTRUMENTATION AND PHOTOGRAPHY

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