Publication Date:
2019-07-13
Description:
A viewgraph presentation describing delta doping high purity CCD's and CMOS for LSST is shown. The topics include: 1) Overview of JPL s versatile back-surface process for CCDs and CMOS; 2) Application to SNAP and ORION missions; 3) Delta doping as a back-surface electrode for fully depleted LBNL CCDs; 4) Delta doping high purity CCDs for SNAP and ORION; 5) JPL CMP thinning process development; and 6) Antireflection coating process development.
Keywords:
Solid-State Physics
Type:
LSST Sensor Working Group Teleconference (Vie Telecon}; Jun 27, 2006; United States
Format:
text
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