ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
We report the linearity, spatial resolution, and granularity of x-ray intensity images recorded on imaging plates (IPs). The IP-processing system, designed for use with a transmission electron microscope (TEM), was used to evaluate the influence of these characteristics on profiles of local lattice distortion in silicon obtained by plane-wave x-ray diffraction topography (PWT). The signal intensity was linear with x-ray doses over four orders of magnitude of intensity, as has also been reported in the case of TEM. The modulation transfer function and root mean square of x-ray intensity images were measured to evaluate the spatial resolution and granularity. The results indicate that profiles of lattice distortion with a period of more than 0.5 mm can be reproduced by PWT in combination with the present IP-processing system. © 1995 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1146420
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