ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
We demonstrate an optical two-beam deflection setup for in situ stress measurements in thin films. By using improved position sensitive photodetectors we reach a resolution of better than 10−4 m−1 for substrate curvature measurement at a bandwidth of 1 kHz, with a relatively short optical path of 0.53 m and without employing a lock-in technique. © 1998 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1148721
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