Publication Date:
2014-12-09
Description:
A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In 1/2 Nb 1/2 )O 3 -Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PIN-PMN-PT) single crystal square-bar (dimensions 2 × 2 × 9 mm 3 ) was developed. The PIN-PMN-PT square-bar stator can generate standing wave elliptical motions in two orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider in two orthogonal directions. The relatively large driving forces of 0.25 N and motion speed of 35 mm/s were obtained under a voltage of 80 V pp at its resonance frequency of 87.5 kHz. The proposed micromotor has potential for applications in micro robots, cell manipulators, and digital cameras as a two-DOF actuator.
Print ISSN:
0021-8979
Electronic ISSN:
1089-7550
Topics:
Physics
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