ISSN:
0268-2605
Keywords:
Si/C/H/F materials
;
laser deposition
;
laser spallation
;
structure
;
reactivity
;
Chemistry
;
Organic Chemistry
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
Solid Si/C/H/F materials laser-deposited from gaseous fluoro-methylsilanes are examined by XPS, SEM, IR and Raman spectroscopy and revealed to be a blend of silicon-carbon-based frameworks, possessing some Si-H and C-H bonds, and carbon whose modification is dependent on the structure of the parent fluoromethylsilane. Their properties are affected by contact with the atmosphere: although incorporation of oxygen into silicon-carbon frameworks is a very fast process, the dramatically improved adhesion to aluminium requires long exposure periods.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/aoc.590070605
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