ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Thermal oxidation characteristics of chemical vapour deposited diamond films were studied at 973 K and at different oxygen potentials by analysing the samples before and after partial oxidation using optical and scanning electron microscopy, X-ray diffraction, and Raman and luminescence spectroscopy. On oxidation, diamond films attached to the silicon wafers undergo a, colour change. Oxidation proceeds by etching pits on the diamond grains in the films. There is no evidence of any phase transformation of diamond to non-diamond carbon forms. The concentration of defects, particularly neutral vacancies, increase on oxidation. Possible routes for the reaction between diamond and oxygen are postulated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01119750
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